In-situ growth condition analysis of AlN interlayers for wafer curvature control in GaN MOVPE on Si (111)

✍ Scribed by Liu, Cai; Kumamoto, Akihito; Sodabanlu, Hassanet; Sugiyama, Masakazu; Nakano, Yoshiaki

• Book ID: 121871479
• Publisher: John Wiley and Sons
• Year: 2014
• Tongue: English
• Weight: 700 KB
• Volume: 11
• Category: Article
• ISSN: 1862-6351
• DOI: 10.1002/pssc.201300528