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Control of polarity and defects in the growth of AlN films on Si (111) surfaces by inserting an Al interlayer

✍ Scribed by Sang-Tae Lee; Byung-Guon Park; Moon-Deock Kim; Jae-Eung Oh; Song-Gang Kim; Young-Heon Kim; Woo-Chul Yang


Book ID
113514178
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
759 KB
Volume
12
Category
Article
ISSN
1567-1739

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