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Dual role of fluorine at the SiâSiO[sub 2] interface

✍ Scribed by Tsetseris, L.; Zhou, X. J.; Fleetwood, D. M.; Schrimpf, R. D.; Pantelides, S. T.

Book ID: 120170105
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 342 KB
Volume: 85
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1825621

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Dual role of fluorine at the SiâSiO[sub 2] interface

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