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Distribution and segregation of arsenic at the SiO[sub 2]/Si interface

✍ Scribed by Steen, C.; Martinez-Limia, A.; Pichler, P.; Ryssel, H.; Paul, S.; Lerch, W.; Pei, L.; Duscher, G.; Severac, F.; Cristiano, F.

Book ID: 121712124
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 843 KB
Volume: 104
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2956700

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