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Segregation and transport coefficients of impurities at the Si/SiO2 interface

✍ Scribed by Sakamoto, K.; Nishi, K.; Ichikawa, F.; Ushio, S.

Book ID: 115466615
Publisher: American Institute of Physics
Year: 1987
Tongue: English
Weight: 524 KB
Volume: 61
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.338089

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