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Infrared studies of transition layers at SiO[sub 2]/Si interface

✍ Scribed by Ono, Haruhiko; Ikarashi, Taeko; Ando, Koichi; Kitano, Tomohisa

Book ID: 121292472
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 384 KB
Volume: 84
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.368917

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