✦ LIBER ✦

Dry etching of porous silicon in high density plasmas

✍ Scribed by Tserepi, A. ;Tsamis, C. ;Gogolides, E. ;Nassiopoulou, A. G.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Low temperature etching of Si and PR in

✍ M. Puech; Ph. Maquin 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 341 KB

Plasma chemistries for high density plas

✍ J. Hong; R. J. Shul; L. Zhang; L. F. Lester; H. Cho; Y. B. Hahn; D. C. Hays; K. 📂 Article 📅 1999 🏛 Springer US 🌐 English ⚖ 364 KB

Etching of porous silicon in basic solut

✍ Hamm, D. ;Sakka, T. ;Ogata, Y. H. 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 440 KB

Patterning of silicon wafers using the p

✍ A.M Barklund; H.-O Blom; S Berg; L Bardos 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 301 KB

Nanometer scale linewidth control during

✍ O Joubert; E Pargon; J Foucher; X Detter; G Cunge; L Vallier 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 465 KB

ChemInform Abstract: GaAs/InGaP Selectiv

✍ D. C. Hays; H. Cho; J. W. Lee; M. W. Devre; B. H. Reelfs; D. Johnson; J. N. Sass 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 32 KB