✦ LIBER ✦
ChemInform Abstract: GaAs/InGaP Selective Etching in BCl3/SF6 High-Density Plasmas.
✍ Scribed by D. C. Hays; H. Cho; J. W. Lee; M. W. Devre; B. H. Reelfs; D. Johnson; J. N. Sasserath; L. C. Meyer; E. Toussaint; F. Ren; et al. et al.
- Publisher
- John Wiley and Sons
- Year
- 2010
- Weight
- 32 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0931-7597
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