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Determination of properties of thin thermal SiO2 on silicon by spectroscopic ellipsometry

✍ Scribed by V. Nayar; C. Pickering; A.M. Hodge

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 511 KB
Volume: 195
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(91)90270-8

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