Complete optical characterization of the
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Ohlídal, I.; Franta, D.; Pinčík, E.; Ohlídal, M.
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Article
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1999
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John Wiley and Sons
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English
⚖ 78 KB
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In this paper results concerning optical analysis of the SiO 2 =Si system performed by the combined ellipsometric and reflectometric method used in multiple-sample modification will be presented. This method is based on combining both the single-wavelength method and the dispersion method. Three mod