Feasibility study to probe thin inorgani
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T. Schram; H. Terryn; A. Franquet
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Article
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2000
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John Wiley and Sons
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English
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The major optical technique applied in this paper is spectroscopic ellipsometry. Ellipsometry measures the polarization change of the light due to interaction with the sample surface. It is called 'spectroscopic' if the measurement is performed at various wavelengths within a spectral interval. Spec