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Detectability limits for boron and phosphorus in silicon by Auger electron spectroscopy (AES)

โœ Scribed by J.H. Thomas III; J.M. Morabito

Book ID
118980850
Publisher
Elsevier Science
Year
1974
Tongue
English
Weight
262 KB
Volume
41
Category
Article
ISSN
0039-6028

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## Abstract The detection limit of Auger electron spectroscopy (AES) can be improved by mathematical methods that reduce the influence of noise. We compared principal component analysis (PCA) and spline smoothing and applied them to the analysis of a phosphorus depth profile in silicon. Both method