✦ LIBER ✦
Improvement of the AES detection limit for phosphorus in silicon by principal component analysis or spline smoothing
✍ Scribed by M. Procop; E.-H. Weber
- Publisher
- John Wiley and Sons
- Year
- 1990
- Tongue
- English
- Weight
- 191 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
Abstract
The detection limit of Auger electron spectroscopy (AES) can be improved by mathematical methods that reduce the influence of noise. We compared principal component analysis (PCA) and spline smoothing and applied them to the analysis of a phosphorus depth profile in silicon. Both methods yield similar results under typical conditions, namely detection limits of ∼0.04 at.% P compared with a limit of 0.09 at.% for the raw data. At a reduce signal‐to‐noise ratio, the PCA failed and the improvement by smoothing remained constant.