Complex refractive index and phosphorus concentration profiles in P+31 ion implanted silicon by ellipsometry and auger electron spectroscopy

✍ Scribed by James R. Adams

• Book ID: 118981717
• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 563 KB
• Volume: 56
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(76)90455-6