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Design of epitaxial CVD reactors: II. Design considerations and alternatives

✍ Scribed by Irfan A. Toor; Hong H. Lee

Book ID: 107789725
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 718 KB
Volume: 72
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(85)90220-9

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