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Design of epitaxial CVD reactors: I. Theoretical relationships for mass and heat transfer

✍ Scribed by Karen J. Klingman; Hong H. Lee

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 773 KB
Volume: 72
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(85)90219-2

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