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Simulation-based design and experimental evaluation of a spatially controllable CVD reactor

✍ Scribed by Jae-Ouk Choo; Raymond A. Adomaitis; Gary W. Rubloff; Laurent Henn-Lecordier; Yijun Liu

Publisher: American Institute of Chemical Engineers
Year: 2005
Tongue: English
Weight: 457 KB
Volume: 51
Category: Article
ISSN: 0001-1541
DOI: 10.1002/aic.10358

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