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Design considerations for the elimination of recirculation in horizontal epitaxial reactors

✍ Scribed by Percy B. Chinoy; Sorab K. Ghandhi

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 745 KB
Volume: 108
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(91)90358-c

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