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Design and development of a lab-model silicon epitaxial reactor

✍ Scribed by Balain, K.S.; Vyas, P.D.; Dixit, B.B.

Book ID: 118682497
Publisher: Institution of Electrical Engineers
Year: 1975
Weight: 752 KB
Volume: 13
Category: Article
ISSN: 0018-9146
DOI: 10.1049/iipi.1975.0010

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