✦ LIBER ✦
Design and process development of a novel multi-wafer OMVPE reactor for growing very uniform GaAs and AlGaAs epitaxial layers
✍ Scribed by Rong-Ting Huang; Dumrong Kasemset; N. Nouri; C. Colvard; D. Ackley
- Book ID
- 112816001
- Publisher
- Springer US
- Year
- 1989
- Tongue
- English
- Weight
- 587 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0361-5235
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