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Depth profiling using secondary ion mass spectrometry and sample current measurements

✍ Scribed by A. B. Tolstoguzov; U. Bardi; S. P. Chenakin

Book ID
110202838
Publisher
Pleiades Publishing
Year
2007
Tongue
English
Weight
227 KB
Volume
1
Category
Article
ISSN
1027-4510

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The possibilities of measuring depth profiles by secondary ion mass spectrometry are evaluated. The influence of different instrumental and experimental parameters on depth resolution in the profiles are studied: the effects of primary ion beam characteristics, reactive gas adsorption and mechanical