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Sputter depth profiling by secondary ion mass spectrometry coupled with sample current measurements

✍ Scribed by U. Bardi; S.P. Chenakin; A. Lavacchi; C. Pagura; A. Tolstogouzov

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 613 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.08.042

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