The possibilities of measuring depth profiles by secondary ion mass spectrometry are evaluated. The influence of different instrumental and experimental parameters on depth resolution in the profiles are studied: the effects of primary ion beam characteristics, reactive gas adsorption and mechanical
Depth-profiling of Cu-Ni sandwich samples by secondary ion mass spectrometry
โ Scribed by W. O. Hofer; H. Liebl
- Publisher
- Springer
- Year
- 1975
- Tongue
- English
- Weight
- 389 KB
- Volume
- 8
- Category
- Article
- ISSN
- 1432-0630
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