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Depth profiles and concentration percentages of SiO2and SiOxinduced by ion bombardment of a silicon (100) target

โœ Scribed by Chin Shuang Lee; Chia Chan Chen; Chin Shun Hsu; Shyong Lee; Ron-Kai Hsu


Book ID
106398127
Publisher
Springer US
Year
2008
Tongue
English
Weight
557 KB
Volume
19
Category
Article
ISSN
0957-4522

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