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Depth profile of disorders in silicon induced by O+ and Si+ ion bombardments

✍ Scribed by Kazuo Shin; Motoyuki Suzuki; Makoto Okazaki; Ikuji Takagi; Kouji Yoshida

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 114 KB
Volume: 46
Category: Article
ISSN: 0969-8043
DOI: 10.1016/0969-8043(95)00083-6

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