✦ LIBER ✦
SIMS depth profiling of implanted layers in silicon under N2+ ion bombardment : V. K. Smirov and S. G. Simakin. Vacuum, 44(9), 885 (1993)
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 104 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0026-2714
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