Nondestructive and quantitative depth profiling analysis of ion bombarded Ta2O5 surfaces by medium energy ion scattering spectroscopy

✍ Scribed by Lee, J. C.

• Book ID: 121681323
• Publisher: AVS (American Vacuum Society)
• Year: 1995
• Tongue: English
• Weight: 410 KB
• Volume: 13
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.579559