Medium-energy ion scattering spectroscopy for quantitative surface and near-surface analysis of ultrathin films

Application of low-energy noble-gas ion

Application of low-energy noble-gas ion scattering to the quantitative surface compositional analysis of binary alloys and metal oxides

✍ van den Oetelaar, L. C. A.; van Benthem, H. E.; Helwegen, J. H. J. M.; Stapel, P 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 488 KB 👁 2 views

Low-energy noble-gas ion scattering (LEIS) probes the outermost atomic layer of a material, but a quantitative compositional analysis of this layer is not straightforward. It is demonstrated that quantiÐcation by calibration can be done, assuming that ion fractions and shielding e †ects are the same