Application of low-energy noble-gas ion scattering to the quantitative surface compositional analysis of binary alloys and metal oxides
✍ Scribed by van den Oetelaar, L. C. A.; van Benthem, H. E.; Helwegen, J. H. J. M.; Stapel, P. J. A.; Brongersma, H. H.
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 488 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
Low-energy noble-gas ion scattering (LEIS) probes the outermost atomic layer of a material, but a quantitative compositional analysis of this layer is not straightforward. It is demonstrated that quantiÐcation by calibration can be done, assuming that ion fractions and shielding e †ects are the same for the reference sample and sample of interest. These assumptions are critically evaluated and LEIS experiments on binary alloys and metal oxides are presented that can partly verify these assumptions. The LEIS measurements of a Cu-Au alloy and CuO powder as a function of initial energy indicate the absence of matrix e †ects in the ion fractions after scattering from the metal atoms in these systems. In metal oxides, shielding of surface metal atoms by shadowing/blocking and ion neutralization by neighbouring atoms can signiÐcantly inÑuence the quantiÐcation of the metal atom concentration and is determined by the local atomic arrangement as illustrated by LEIS experiments of CuO and ZnO samples.