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Deposition of Iridium Thin Films Using New IrI CVD Precursors

✍ Scribed by Y.-L. Chen; C.-S. Liu; Y. Chi; A. J. Carty; S.-M. Peng; G.-H. Lee

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 455 KB
Volume: 8
Category: Article
ISSN: 0948-1907
DOI: 10.1002/1521-3862(20020116)8:1<17::aid-cvde17>3.0.co;2-3

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