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A New OMCVD Iridium Precursor for Thin Film Deposition

✍ Scribed by P. Serp; R. Feurer; P. Kalck; H. Gomes; J. L. Faria; J. L. Figueiredo

Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 326 KB
Volume: 7
Category: Article
ISSN: 0948-1907
DOI: 10.1002/1521-3862(200103)7:2<59::aid-cvde59>3.0.co;2-s

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