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Deposition of HfO2, Gd2O3 and PrOx by Liquid Injection ALD Techniques

✍ Scribed by R. J. Potter; P. R. Chalker; T. D. Manning; H. C. Aspinall; Y. F. Loo; A. C. Jones; L. M. Smith; G. W. Critchlow; M. Schumacher

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 607 KB
Volume: 11
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200406348

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