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Deposition of dielectrics using a matrix distributed electron cyclotron resonance plasma enhanced chemical vapor deposition system

✍ Scribed by R. Botha; B. Haj Ibrahim; P. Bulkin; B. Drévillon

Book ID: 108289552
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 470 KB
Volume: 515
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2006.11.184

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