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Defects in SiO2 in buried-oxide structures formed by O+ implantation

✍ Scribed by R.C. Barklie; T.J. Ennis; P.L.F. Hemment; K. Reeson

Book ID: 113279045
Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 401 KB
Volume: 32
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(88)90251-0

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