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Interface defects introduced in Si/SiO2 structures by hydrogen implantation

✍ Scribed by S. Alexandrova; A. Szekeres; I. Nedev

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 342 KB
Volume: 150
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(87)90103-9

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