✦ LIBER ✦
Defects in SiO2 in buried-oxide structures formed by O+ implantation: R C Barklie et al,Nucl Instrum Meth Phys Res,B32, 1988, 433–436
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 155 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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