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Defects in hydrogenated microcrystalline silicon prepared by plasma-enhanced chemical vapour deposition

✍ Scribed by Morigaki, K.; Niikura, C.; Hikita, H.; Yamaguchi, M.

Book ID
121469881
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
544 KB
Volume
105
Category
Article
ISSN
0021-8979

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πŸ“œ SIMILAR VOLUMES

Preparation of hydrogenated amorphous si
Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition
✍ J Huran; J Ε afrΓ‘nkovΓ‘; A.P. Kobzev πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 252 KB

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic