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Microcrystalline silicon carbon alloy film prepared by photo-chemical vapour deposition

✍ Scribed by Sukriti Ghosh; Abhijit De; Swati Ray

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 522 KB
Volume: 245
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(94)90906-7

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