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Doped Microcrystalline Silicon Layers for Solar Cells by 13.56MHz Plasma-enhanced Chemical Vapour Deposition

✍ Scribed by Jidong Long; Yunfeng Yin; Shing Yin R. Sian; Zekun Ren; Juan Wang; Premachandran Vayalakkara; Selvaraj Venkataraj; Armin G. Aberle

Book ID: 116426559
Publisher: Elsevier
Year: 2012
Weight: 622 KB
Volume: 15
Category: Article
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2012.02.028

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