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Defect generation statistics in thin gate oxides

✍ Scribed by Ielmini, D.; Spinelli, A.S.; Lacaita, A.L.; van Duuren, M.J.

Book ID: 114617510
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 429 KB
Volume: 51
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2004.832104

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