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Defect analyses of selective epitaxial grown GaAs on STI patterned (001) Si substrates

✍ Scribed by Kim, S.W.; Cho, Y.D.; Shin, C.S.; Park, W.K.; Kim, D.H.; Ko, D.H.


Book ID
122581661
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
1012 KB
Volume
401
Category
Article
ISSN
0022-0248

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