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Defect reduction of GaAs epitaxy on Si (001) using selective aspect ratio trapping

✍ Scribed by Li, J. Z.; Bai, J.; Park, J.-S.; Adekore, B.; Fox, K.; Carroll, M.; Lochtefeld, A.; Shellenbarger, Z.


Book ID
121746480
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
488 KB
Volume
91
Category
Article
ISSN
0003-6951

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