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Defect reduction of GaAs/Si epitaxy by aspect ratio trapping

✍ Scribed by J. Z. Li; J. Bai; C. Major; M. Carroll; A. Lochtefeld; Z. Shellenbarger


Book ID
121741640
Publisher
American Institute of Physics
Year
2008
Tongue
English
Weight
367 KB
Volume
103
Category
Article
ISSN
0021-8979

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