✦ LIBER ✦

Deep trench plasma etching of single crystal silicon using SF6/O2 gas mixtures

✍ Scribed by D’Emic, Christopher P.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A study on the reactive ion etching of S

✍ S. C. Ahn; S. Y. Han; J. L. Lee; J. H. Moon; B. T. Lee 📂 Article 📅 2004 🏛 TechnoPress 🌐 English ⚖ 262 KB

The use of “actinometer” gases in optica

✍ Riccardo d'Agostino; Vincenzo Colaprico; Francesco Cramarossa 📂 Article 📅 1981 🏛 Springer 🌐 English ⚖ 458 KB

Secondary effects of single crystalline

✍ I.W. Rangelow; P. Thoren; K. Maβeli; R. Kassing; M. Engelhardt; S. Schwarzl 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 666 KB

Inductively coupled plasma reactive ion

✍ Hyun-Joon Choi; Byung-Teak Lee 📂 Article 📅 2003 🏛 Springer US 🌐 English ⚖ 328 KB

[IEEE 1997 International Symposium on Mi

✍ Yao Yahong, ; Zhao Yongjun, 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 505 KB