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The use of “actinometer” gases in optical diagnostics of plasma etching mixtures: SF6-O2

✍ Scribed by Riccardo d'Agostino; Vincenzo Colaprico; Francesco Cramarossa

Publisher: Springer
Year: 1981
Tongue: English
Weight: 458 KB
Volume: 1
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf00565993

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