Mass spectrometer-wall probe diagnostic of Ar discharges containing SF6and/or O2: Reactive ions in etching plasmas

✍ Scribed by H. G. Lergon; M. Venugopalan; K. G. Müller

• Publisher: Springer
• Year: 1984
• Tongue: English
• Weight: 582 KB
• Volume: 4
• Category: Article
• ISSN: 0272-4324
• DOI: 10.1007/bf00647191