[IEEE 1997 International Symposium on Micromechanics and Human Science - Nagoya, Japan (5-8 Oct. 1997)] 1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) - Anisotropic trench etching of Si using SF/sub 6//O/sub 2/ mixture

✍ Scribed by Yao Yahong, ; Zhao Yongjun,

• Book ID: 125484521
• Publisher: IEEE
• Year: 1997
• Tongue: English
• Weight: 505 KB
• Category: Article
• ISBN-13: 9780780341715
• DOI: 10.1109/MHS.1997.768858