✦ LIBER ✦
Secondary effects of single crystalline silicon deep- trench etching in a chlorine-containing plasma for 3- dimensional capacitor cells
✍ Scribed by I.W. Rangelow; P. Thoren; K. Maβeli; R. Kassing; M. Engelhardt; S. Schwarzl
- Book ID
- 107920317
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 666 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0167-9317
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