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Decay length of the pressure dependent deposition rate for magnetron sputtering

โœ Scribed by Drusedau, Tilo P.; Lohmann, Mirko; Garke, Bernd

Book ID
118229181
Publisher
AVS (American Vacuum Society)
Year
1998
Tongue
English
Weight
358 KB
Volume
16
Category
Article
ISSN
0734-2101

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