On the Deposition Rates of Magnetron Sputtered Thin Films at Oblique Angles

✍ Scribed by Alvarez, Rafael; Garcia-Martin, Jose M.; Lopez-Santos, Maria C.; Rico, Victor; Ferrer, Francisco J.; Cotrino, Jose; Gonzalez-Elipe, Agustin R.; Palmero, Alberto

• Book ID: 121748755
• Publisher: John Wiley and Sons
• Year: 2014
• Tongue: English
• Weight: 387 KB
• Volume: 11
• Category: Article
• ISSN: 1612-8850
• DOI: 10.1002/ppap.201300201